Article ID Journal Published Year Pages File Type
1527654 Materials Chemistry and Physics 2007 5 Pages PDF
Abstract

Hydrogenated amorphous silicon films were fabricated on p-type, 100 mm diameter 〈1 0 0〉 silicon wafers by plasma-enhanced chemical vapor deposition (PECVD) using silane and hydrogen. The structure and composition of the hydrogenated amorphous silicon films were investigated using micro-Raman spectroscopy and cross-sectional transmission electron microscopy (XTEM). The hydrogenated amorphous silicon films were subsequently soaked in simulated body fluids to evaluate apatite formation. Carbonate-containing hydroxyapatite (bone-like apatite) was formed on the surface suggesting good bone conductivity. The amorphous structure and presence of surface SiH bonds are believed to induce apatite formation on the surface of the hydrogenated amorphous silicon film. A good understanding of the surface bioactivity of silicon-based materials and means to produce a bioactive surface is important to the development of silicon-based biosensors and micro-devices that are implanted inside humans.

Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
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