Article ID Journal Published Year Pages File Type
1531654 Materials Science and Engineering: B 2007 4 Pages PDF
Abstract

PZT films with (1 0 0) and (1 1 0) orientation were prepared by spin coating using the chemical solution deposition (CSD) method on an SRO/Si or a Pt/Ti/SiO2/Si substrate. The remnant polarization and the saturation polarization of the PZT/SRO/Si film were 21 and 35 μC/cm2, and those of the PZT/Pt/Ti/SiO2/Si film were 20 and 31 μC/cm2. The remnant polarization of the PZT/SRO/Si film maintained more than 108 switching cycles, and the fatigue property was observed for the PZT film fabricated on the Pt/Ti/SiO2/Si electrode.

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Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
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