Article ID Journal Published Year Pages File Type
1531804 Materials Science and Engineering: B 2006 4 Pages PDF
Abstract
As evidenced by the HP-dependent PL spectra, the treatment of Si-N under HP at 1070-1400 K stimulates precipitation of oxygen interstitials (Oi) with generation of small oxygen-containing defects. The effect of HP on microstructure of nitrogen-containing Cz-Si is related to stress-induced activation of nitrogen to form nuclei for precipitation of Oi's.
Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
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