Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1532504 | Materials Science and Engineering: R: Reports | 2011 | 34 Pages |
Abstract
The intention of this review paper is to present the most important aspects of theoretical and experimental EM investigations together with a brief history of the development of the main concepts and methods. We present an overview of EM models from their origins in classical materials science methods up to the most recent developments for submicron interconnect features, as well as the application of ab initio and first principle methods. The main findings of experimental studies, important for any model development and application, will also be presented.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
H. Ceric, S. Selberherr,