Elliptical concave microlens arrays built in the photosensitive TiO2/ormosils hybrid films

Photosensitive TiO2/organically modified silane hybrid thin films were prepared by a low-temperature sol–gel spin-coating technique. Optical and structural properties of the hybrid films with different titanium contents were characterized by prism coupling technique, UV–visible spectroscopy, Fourier transform infrared spectroscopy, and thermal gravimetric analysis. Advantages for fabrication of elliptical concave micro-lens arrays (MLAs) based on the as-prepared hybrid films were demonstrated by combining polydimethylsiloxane soft mold with a UV-cured imprint technique. Results indicate that the as-prepared hybrid films have great applicability for the fabrication of photonic components, and the fabrication technique provides a simple and cost-effective way for the fabrication of the sol–gel elliptical concave MLAs.