Article ID Journal Published Year Pages File Type
1534373 Optics Communications 2015 5 Pages PDF
Abstract

Titania cladding is deposited on a 5 μm-radius silicon-on-insulator ring resonator and grating couplers which are patterned by deep-ultraviolet lithography. The influence of titania cladding is studied by measuring the transmission spectra of the ring resonator coupled to a pair of single-mode fibers through the grating couplers. Temperature dependent wavelength shift of TE-like mode through the ring resonator is reduced to −20 to +20 pm/K from 74 pm/K without a noticeable degradation of insertion loss through the ring and the transmission peak of grating coupler is shifted at about 50 nm by the addition of titania cladding.

Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
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