| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1534859 | Optics Communications | 2014 | 4 Pages |
Abstract
The angular spectrum of radially polarized Laguerre–Gaussian beams was tailored by an annular aperture in a semiconductor solid immersion lens microscope. The radii of two concentric rings in the amplitude aperture were optimized by a multi-objective particle swarm optimization algorithm. A GaAs solid immersion lens with NA=3.4 was used in the numerical calculation and a spot size of 98 nm (<λ/10<λ/10) at a wavelength of 1064 nm illumination was obtained.
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Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Mohamadreza G. Banaee, M. Selim Ünlü, Bennett B. Goldberg,