Multi-channel DFB laser arrays fabricated by SAG technology

Selective area growth (SAG) of multi-quantum well materials (MQW) has been carried out for the fabrication of monolithically integrated DFB laser arrays. The effects of different growth conditions on the control of MQW emission wavelengths are studied in view of achieving uniformly spaced array wavelengths. It is found that SAG of MQWs at a lower reactor pressure and with a wider opening of the SAG masks shows better control of both the optical properties of the MQW materials and the emission wavelengths of lasers. Through optimizing the SAG conditions, a rather good control of the emission wavelengths of DFB lasers is obtained, with less than 0.1 nm wavelength deviations from its corresponding fitted value.