Development of an incoherent optical frequency comb interferometer for long-range and scanless profilometry and tomography

An optical resonator was installed as an incoherent frequency comb generator into a two-dimensional single-shot profilometry and tomography system to increase the measurement range up to 30 times compared with a conventional white-light interferometer. The dynamic range of the sample set position was experimentally confirmed to be ∼28 mm, equivalent to the coherency of the resonator. Scanless measurement can be achieved through high-order comb interference. In this study, we demonstrated tomography with a resolution of ∼11 μm and effective high-order interference fringe discrimination.