Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1535756 | Optics Communications | 2013 | 6 Pages |
Abstract
Novel structure of dual-focus microlens array with dual layers is proposed. Dual-focus microlenses formed by combination of dual layers of concentric spherical lenses are fabricated through photo lithography and dry etching processes. The dual lens is formed by combination of a thermally reflowed photo resist lens on a fused quartz lens which is formed by dry etching of the fused quartz substrate.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Jong-Moo Lee, Donghyo Lee, Yongsoon Baek,