Article ID Journal Published Year Pages File Type
1535756 Optics Communications 2013 6 Pages PDF
Abstract

Novel structure of dual-focus microlens array with dual layers is proposed. Dual-focus microlenses formed by combination of dual layers of concentric spherical lenses are fabricated through photo lithography and dry etching processes. The dual lens is formed by combination of a thermally reflowed photo resist lens on a fused quartz lens which is formed by dry etching of the fused quartz substrate.

Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
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