CMOS—compatible reconfigurable microring demultiplexer with doped silicon slab heater

We present a 1×4 reconfigurable demultiplexer based on cascaded silicon microring resonators. The device is fabricated on a 0.18 μm complementary metal oxide semiconductor (CMOS) process. A homogeneous doped silicon slab heater is proposed and fabricated directly on the slab region of the microring resonator for thermal tuning. The flows of the heating currents in the heaters are parallel to the ring waveguide through the heavily doped slab regions located on both sides of the ring waveguide without through the waveguide core regions. The proposed doped heaters are experimentally verified with low-voltage operation and tuning efficiency of ∼77 pm/mW. Without any tuning or trimming, predicted average channel spacing distribution in the whole free spectral range (FSR) is demonstrated. Full reconfigurability is also demonstrated in the demultiplexer with channel spacing of 2 nm (250 GHz) and 1 nm (125 GHz), corresponding to channel isolation of less than −21 dB and −16 dB, respectively. Such a low-voltage operation and reconfigurable demultiplexer is suitable for on-chip optical interconnect.