Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1537582 | Optics Communications | 2010 | 7 Pages |
Abstract
In order to realize real-time displacement measurement with high resolution, sinusoidal phase modulation and integrating-bucket method are introduced in the self-mixing interference (SMI) system firstly. The phase of the laser beam is modulated by an electro-optic modulator (EOM) in the external cavity. Theoretical analysis, simulation results and error evaluation are presented. Experimentally, the micro-displacement of a high-precision commercial PZT is reconstructed and the reconstruction accuracy is on the order of nanometers for displacements of a few micrometers.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Dongmei Guo, Ming Wang,