Highly-sensitive silicon-on-insulator sensor based on two cascaded micro-ring resonators with vernier effect

A highly-sensitive integrated optical biosensor based on two cascaded micro-rings resonator (MRR) is investigated theoretically and experimentally. The free spectral ranges (FSRs) of two cascaded micro-rings are designed to be slightly different in order to generate Vernier effect. A preliminary investigation of our sensor with a Q factor of 2 × 104 using different ethanol concentrations shows that the Vernier effect can improve the sensitivity to 1300 nm per refractive index unit (RIU), compared to 62 nm/RIU for a single ring sensor. The sensor also has a large measurement range of refractive index change up to 1.15 × 10− 2 RIU. It can be useful for low-cost and highly-sensitive optical biosensor system.