High-precision technique for in-situ testing of the PZT scanner based on fringe analysis

A technique based on fringe analysis is presented for the in-situ testing of the PZT scanner, including the end rotation analysis and displacement measurement. With the interferograms acquired in the Twyman-Green interferometer, the testing can be carried out in real time. The end rotation of the PZT scanner and its spatial displacement deviation are analyzed by processing the fringe rotation and interval changes; displacement of the PZT scanner is determined by fringe shift according to the algorithm of template-matching, from which the relation between the driving voltage and displacement is measured to calibrate the nonlinearity of the PZT scanner. It is shown by computer simulation and experiments that the proposed technique for in-situ testing of the PZT scanner takes a short time, and achieves precise displacement measurement as well as the end rotation angle and displacement deviation measurement. The proposed method has high efficiency and precision, and is of great practicality for in-situ calibration of the PZT scanner.