Article ID Journal Published Year Pages File Type
1538303 Optics Communications 2010 6 Pages PDF
Abstract

The effect of spurious diffraction orders due to an in-line diffractive compensator for the measurement of aspheric surfaces is analytically studied. The use of a filtering aperture to isolate the measurement diffraction order from the stray orders introduces additional spurious fields that must be analyzed for a correct evaluation of surface defects. In this work the influence of the additional diffraction orders is studied and an analytical expression for the disturbing field on the detector is obtained.

Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
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