Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1538303 | Optics Communications | 2010 | 6 Pages |
Abstract
The effect of spurious diffraction orders due to an in-line diffractive compensator for the measurement of aspheric surfaces is analytically studied. The use of a filtering aperture to isolate the measurement diffraction order from the stray orders introduces additional spurious fields that must be analyzed for a correct evaluation of surface defects. In this work the influence of the additional diffraction orders is studied and an analytical expression for the disturbing field on the detector is obtained.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Eugenio Garbusi, Wolfgang Osten,