Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1538950 | Optics Communications | 2007 | 5 Pages |
Abstract
In this paper, we make an investigation into the reflectance performance of the Si3N4 self-suspended subwavelength grating (SSG) via changing several parameters including the incident wavelength, the grating period, the grating thickness and the grating filling ratio. For TM polarization of incidence, numerical results by the rigorous coupled-wave method reveal that the reflectance spectrum of the Si3N4 SSG has a narrow linewidth (less than 1 nm), high peak reflectance (100%), and low side bands (less than 0.5%) simultaneously in the optical telecommunication wavelength region. By using a micro-electromechanical-systems actuator, it is believed that the Si3N4 SSG should serve as tunable optical filters in optical telecommunication systems.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Jia-Sheng Ye, Yoshiaki Kanamori, Fang-Ren Hu, Kazuhiro Hane,