| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1539884 | Optics Communications | 2006 | 5 Pages |
Abstract
We present a simple solution to the beam-shaping problem in which a wide, typically rectangular spatial distribution of an excimer-laser beam should be transformed into a flat-top distribution, a few millimeters wide in both directions. The set-up can be made practically lossless and it allows the energy density of the pulse to be increased by a factor of 50. The method finds use, e.g., in pulsed laser deposition, UV lithography and micro machining.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
T. Kajava, A. Hakola, H. Elfström, J. Simonen, P. Pääkkönen, J. Turunen,