Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1540714 | Optics Communications | 2008 | 9 Pages |
Abstract
A flexible integration of optical switch with optical power splitting and attenuating functions has been proposed to optimally serve optical fiber-based networking applications. In this switch, an etched binary-slope sidewall reflector is electrostatically actuated in and out of the plane to manipulate optical signals between input and output optical fibers. The fabrication process is a simple combination of a bulk-silicon micromachining process and silicon-to-glass anodic bonding where fiber alignment grooves, reflectors and actuators are fabricated on the same silicon substrate. Ball-lensed fibers are assembled with the device to achieve high coupling efficiency. Performances of the fabricated devices are measured and discussed. The switching time is less than 9Â ms at 31Â V. The excess loss of the device is less than 3Â dB and the controllable attenuation range is up to 38Â dB at 139Â V, respectively. Moreover, polarization-dependent loss is less than 0.7Â dB in the whole attenuation and splitting range.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Q.H. Chen, W.G. Wu, Z.Q. Wang, G.Z. Yan, Y.L. Hao,