| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1540849 | Optics Communications | 2008 | 5 Pages |
Abstract
We have fabricated 9-channel silicon wavelength-division-multiplexing (WDM) ring filters using 193 nm deep-ultraviolet (DUV) lithography and investigated the spectral properties of the ring filters by comparing the transmission spectra with and without an upper cladding. The average channel-spacing of the 9-channel WDM ring filter with a polymeric upper cladding is measured about 1.86 nm with the standard deviation of the channel-spacing about 0.34 nm. The channel crosstalk is about −30 dB, and the minimal drop loss is about 2 dB.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Jong-Moo Lee, Sahnggi Park, Gyungock Kim,