Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1541260 | Optics Communications | 2008 | 4 Pages |
Abstract
Surface roughness is a key point for all X-ray reflective optics, and is in general obtained through careful polishing and surface finishing. Here we propose a simple and inexpensive procedure to drastically reduce surface roughness: using sol–gel silica coatings. The motivation for this work is the improvement of X-ray mirrors obtained on Si substrate using micro-fabrication technology, where the usual polishing methods cannot be applied. Sol–gel silica layers dramatically reduce surface roughness and enhance the X-ray reflectivity up to acceptable values. The proof-of-principle presented in this paper can be further improved and applied to systems of different nature.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
A. Surpi, F. Poli, L. Armelao, D. Pelliccia, I. Bukreeva, D. Barreca, S. Lagomarsino,