Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1541425 | Optics Communications | 2007 | 4 Pages |
Abstract
A Luus-Jaakola optimization procedure is described that simultaneously determines the optical constants, thickness and root mean square roughness of thin films for reflectance versus angle-of-incidences data measured in the EUV/soft X-ray region. The optimization method is applied to different films at different wavelengths. The results show that the Luus-Jaakola optimization procedure is able to determine the thickness of films and the roughness with an accuracy of less than 7%. The optical constants obtained are also in good agreement with reported values for films having an error of less than 1%.
Related Topics
Physical Sciences and Engineering
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Authors
S.M. Al-Marzoug, R.J.W. Hodgson,