PDL free plasma enhanced chemical vapor deposition SiC optical waveguides and devices

Planar silicon carbide (SiC) waveguides are proposed for fabrication on a silicon substrate with an oxide isolation layer. Using post deposition annealing it is possible to achieve low polarisation-dependent loss (PDL) within optical SiC waveguides fabricated using a low temperature deposition technique. The proposed waveguides are optically characterised and successfully used in power splitters and vibration sensors. Results before and after annealing cycles for those devices are discussed. The interesting optical characteristics of SiC waveguides as well as the first passive components presented open the way for photonic sensing in harsh environment where SiC is a very promising material.