| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1542152 | Optics Communications | 2006 | 6 Pages |
Abstract
Movements of a surface profile are measured with a two-grating interferometer using sinusoidal phase-modulation. Since sinusoidal phase-modulating (SPM) interferometry can record a phase change due to the movement of an object in the interference signal, the SPM interferometer is suitable for measuring the movement of the object. Some experiments show that the two-grating interferometer can measure a sinusoidal vibration with amplitude of several tens of microns and a step movement with a magnitude of several microns.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Hai Huan, Osami Sasaki, Takamasa Suzuki,