| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1542509 | Optics Communications | 2006 | 6 Pages |
Abstract
A white light interferometer can be used to measure profiles of a few nanometers and is therefore particularly well adapted for micro electro mechanical systems characterization. We present theoretical and experimental results on the profile precision as a function of the light source spectrum. We demonstrate that even if a broadband source is used in the phase shifting mode, the knowledge of the light spectrum allows to calculate a correction factor. This factor determines the local effective wavelength and can be used in order to increase the measurement precision of sample profiles.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
S. Jorez, A. Cornet, J-P. Raskin,