Analysis of integrated corner mirrors by using a wide-angle beam propagation method

An integrated corner mirror is analyzed by using a two-dimensional (2D) wide-angle beam propagation method (WA-BPM) combining with an effective index method (EIM). Both the reflection efficiency and the phase variation due to a total internal reflection (TIR) for the TE and TM modes are calculated. A non-perfect fabrication (such as a tilted or displaced mirror) introduces an additional reflection loss and some errors of the phase variation. The additional reflection loss due to a tilted mirror increases rapidly as the tilted angle increases and becomes more sensitive to the tilted angle when the confinement of the waveguide becomes weaker. It is shown that the displacement of a mirror influences the phase variation greatly and the difference of the phase variation between the TE and TM modes is not sensitive to the displacement of the mirror.