Fabrication-tolerant 1310 nm laterally coupled distributed feedback lasers with high side mode suppression ratios

1310 nm laterally coupled distributed feedback (LC-DFB) laser was designed and fabricated using stepper lithography. LC-DFB lasers, unlike conventional DFB lasers, do not require a regrowth step during the fabrication process. The lateral grating of the LC-DFB lasers can be patterned along both sidewalls of the ridge waveguide. Gratings with higher order can enhance the lithographic tolerance for lower resolution patterning, yielding lasers more amenable to mass-manufacturing. Excellent side mode suppression ratio over 53 dB has been measured with a single mode lasing around 1310 nm.

Research highlights► 1310 nm laterally coupled distributed feedback (LC-DFB) laser was designed and fabricated using stepper lithography. ► LC-DFB lasers, unlike conventional DFB lasers, do not require a regrowth step during the fabrication process. ► The lateral grating of the LC-DFB lasers can be patterned along both sidewalls of the ridge waveguide. ► Gratings with higher order can enhance the lithographic tolerance for lower resolution patterning, yielding lasers more amenable to mass-manufacturing. ► Excellent side mode suppression ratio over 53 dB has been measured with a single mode lasing around 1310 nm.