Article ID Journal Published Year Pages File Type
1546356 Physica E: Low-dimensional Systems and Nanostructures 2011 6 Pages PDF
Abstract
► We propose a novel silicon on insulator lateral double diffused MOSFET. ► The buried insulator layer under the active region consists of two materials. ► The proposed structure is called dual material buried insulator SOI-LDMOSFET. ► We demonstrate that heat dissipation and self-heating effects can be improved. ► Results show that silicon nitride is a suitable alternative as buried insulator.
Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
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