| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1546557 | Physica E: Low-dimensional Systems and Nanostructures | 2008 | 5 Pages |
Abstract
A novel hydrofluoric acid (HF) free atmospheric pressure chemical vapor deposition (APCVD) method has been developed to synthesize macropores on silicon. Field emission scanning electron microscopy (FESEM), X-ray powder diffraction (XRD) and energy-dispersive X-ray (EDX) spectrum indicate that the composition of macropores with the diameters of several hundred nanometers is silica. Moreover, the mechanism of the formation of the macropores has been preliminarily discussed. The photoluminescence (PL) spectrum of the macropores shows a broad violet emission band with the peak position at 402Â nm, which is related with the defects of silica.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Zhihong Liu, Hui Zhang, Lei Wang, Dongsheng Li, Deren Yang,