Studies on vacuum microelectronic pressure sensors based on carbon nanotubes arrays

A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the electron source. The sensor consisted of the anode-sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) arrays cathode in the micro-vacuum chamber. MWNTs were grown on the silicon substrate by thermal CVD. The prototype pressure sensor had measured sensitivity of about 0.35–6.1 nA/Pa (5–550 KPa). The work suggests the potential use of CNTs-based field-emitter in microsensors such as accelerometers and tactile sensors.