Article ID Journal Published Year Pages File Type
1547634 Physica E: Low-dimensional Systems and Nanostructures 2009 6 Pages PDF
Abstract

In the recent past, vertical surrounding gate (VSG) MOSFETs have gained importance since defining their nanoscale channel length no longer depends on lithographic limitations and since they can lead to high packing densities. However, as the channel lengths decrease below 100 nm, VSG MOSFETs too suffer from short-channel effects due to the coupling between the drain and source side charges. In this paper, we demonstrate that using a recessed source, the short-channel effects in nanoscale VSG MOSFETs can be effectively controlled.

Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
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