| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1552457 | Superlattices and Microstructures | 2016 | 5 Pages |
•A novel method for detection of cantilever based biosensors has been proposed.•The method is based on employing cantilever as suspended gate of a MOSFET.•The performance of proposed method is computationally analyzed using COMSOL.•The method of detection is capable for integration for array of cantilevers.•The method is not complicated comparing with other common methods, but the sensitivity of the measurement is excellent.
A novel method for detection of biological species based on measurement of cantilever deflection has been proposed and numerically evaluated. Employing the cantilever as a moving gate of a MOSFET structure, its deflection can be analyzed via current characterization of the MOSFET consequently. Locating the cantilever as a suspended gate of a MOSFET on a substrate, the distance between cantilever and oxide layer will change the carrier concentration. Accordingly, it will be resulted in different current voltage characteristics of the device which can be easily measured using simple apparatuses. In order to verify the proposed method, the performance of system has been theoretically analyzed using COMSOL platform. The simulation results have confirmed the performance and sensitivity of the proposed method.
