Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1553661 | Superlattices and Microstructures | 2013 | 8 Pages |
Abstract
We investigate the agglomeration behavior of Ag films on GaN as functions of thickness and temperature. The SEM results show that the thinner films become agglomerated at temperatures below 500 °C, whereas the thicker films (⩾700 nm) remain stable with hillocks at 500 °C, (although the density of small holes depends on their thickness). The holes that are formed adjacent to the hillocks lead to the initiation of agglomeration. The X-ray texture analyses exhibit that although the majority of grains are ã1 1 1ã-oriented, a fraction of them are ã1 0 0ã-textured when deposited on GaN. For the samples thicker than 700 nm, amount of the ã1 0 0ã-textured grains increases with increasing temperature, but this is not the case for the samples thinner than 500 nm. The SEM and X-ray pole figure results exhibit that a decrease in the I{2 0 0}/I{1 1 1} pole figure intensity ratios is related to the growth of holes, leading to agglomeration. Based on the SEM and X-ray texture results, the thickness dependence of the texturing and agglomeration behavior of Ag films are described and discussed.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Chang-Hyeong Lee, Jae-Seong Park, Tae-Yeon Seong,