Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1555009 | Superlattices and Microstructures | 2008 | 4 Pages |
Abstract
Porous silicon has various fields of application. Its electrical and optical properties are under study since many years, and it is also known that porosity has a considerable effect on the mechanical properties (i.e. hardness, compressive strength, elasticity, breaking strength). In the present paper a novel technique for preparing samples of porous silicon in order to measure the breaking strength of PS is presented. The technique is based on wet corrosion deposition of copper and creating a meniscus shaped porous silicon. Results of the measurements of PS with different porosity and structure of pores made on p+ and n+ material are presented. Possible applications of the data are discussed.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
A. Klyshko, M. Balucani, A. Ferrari,