| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1555132 | Superlattices and Microstructures | 2007 | 7 Pages |
The investigation of structure, optical and electrical properties of tin and zinc oxide films on glass substrates by using magnetron sputtering are carried out. X-ray data show the formation of textured tin oxides film during deposition and its transformation to SnO2 polycrystalline film at low temperature (200 ∘C) if the concentration of oxygen in the chamber is high (O2 — 100%, Ar — 0%). Optimal conditions of SnO2 polycrystalline film deposition (pressure of Ar–O2 mixture in chamber — 2.7 Pa, concentration of O2 — 10%) are determined. Low resistivity of as-deposited ZnO film and increasing ZnO crystallite sizes and phase volume at temperatures higher than the melting point of Zn (419.5 ∘C) are explained by formation of conductive Zn and ZnO particle chains and their destruction, respectively.
