Effect of thermal annealing on ZnO:Al thin films grown by spray pyrolysis

We report the effect of thermal annealing in air on the structural and optical properties of undoped and aluminium-doped (1%–4%) zinc oxide (AZO) thin films, grown by the spray pyrolysis technique on quartz substrates. Films were characterized by X-ray diffraction, low-temperature photoluminescence, electrical resistivity, and Raman spectroscopy after annealing at temperatures between 500 and 900 ∘C. Annealing in air improves the long-range order crystalline quality of the bulk crystals, but promotes a number of point defects in the surface affecting both the resistivity and the photoluminescence.