| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1555641 | Current Opinion in Solid State and Materials Science | 2007 | 9 Pages |
Abstract
Recent developments in porous silicon gas sensors have been reviewed. Monitored species detection levels, and the mechanisms of sensing for different sensor designs are also discussed. Porous silicon surface modification methods have been employed for detecting different gas molecules; H2O, ethanol, methanol, isopropanol, COx, NOx, NH3, O2, H2, HCl, SO2, H2S and PH3.
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Chemistry
Authors
Serdar Ozdemir, James L. Gole,