| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1562184 | Computational Materials Science | 2011 | 8 Pages |
Abstract
⺠We conducted FE analysis of the dynamic behavior of monolithic piezoelectric micro-mirror. ⺠Induced residual stress exhibited significance influence on the dynamic behavior of micro-mirror. ⺠Computed eigenfrequencies increased with increasing the thickness of Si layer. ⺠Fundamental (flexural) eigenfrequencies increased (decreased) with increasing PZT film thickness. ⺠FE modeling can serve as an effective tool to a priori predict the dynamic behavior of micro-mirror.
Related Topics
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Computational Mechanics
Authors
M.A. Matin, D. Akai, K. Ozaki, N. Kawazu, M. Hanebuchi, K. Sawada, M. Ishida,