Article ID Journal Published Year Pages File Type
1563556 Computational Materials Science 2009 4 Pages PDF
Abstract

Electromigration is an important mechanism of deformation and failure in miniaturized electronics materials. In this paper, a 2-D mesoscopic simulation method is developed for analyzing electromigration-induced stress in thin films and finite element method is implemented for solution. Numerical simulations are compared with theoretical result and comparisons validate the model. The method has advantage in describing boundary conditions for constrained diffusion when focusing on creep process of thin films.

Related Topics
Physical Sciences and Engineering Engineering Computational Mechanics
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