Article ID Journal Published Year Pages File Type
1578894 Materials Science and Engineering: A 2011 6 Pages PDF
Abstract
► The fatigue behavior of nano-components consisting of Si, Cu, and SiN was examined. ► A cyclic load broke the component along the Cu/Si interface. ► The S-N curve showed that the trend was similar to that of a bulk metal. ► The fracture behavior was brittle owing to the high yield stress of Cu. ► The result was compared with that of a component with Cu of different thickness.
Related Topics
Physical Sciences and Engineering Materials Science Materials Science (General)
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