Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1581026 | Materials Science and Engineering: A | 2009 | 5 Pages |
Abstract
This paper aims to clarify the confusion in interpreting the deformation mechanism of monocrystalline silicon subjected to nanoindentation. The indentation tests were carried out over an ultra-low range of loads with various loading rates using a Berkovich indenter. It was found that with a proper area function of the indenter tip the mechanical properties of silicon can be accurately characterised, that a pop-in event may occur upon ultra-low loading and represents the onset of phase transition, and that a lower loading rate favors a sudden volume change but a rapid loading process tends to generate a gradual slope change of the load-displacement curve.
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
Li Chang, Liangchi Zhang,