AFM characterization of the shape of surface structures with localization factor

•Localization factor is introduced to characterize the shape of surface structures with AFM.•The optimal operation range of this parameter is defined.•LF is used to characterize the microstructure of gold thin films.•The effect of thermal annealing on the microstructure of gold thin films is investigated.•The oxidation of a polished tin surface is also characterized with LF.

Although with the use of scanning probe microscopy (SPM) methods the topographical imaging of surfaces is now widely available, the characterization of surface structures, especially their shape, and the processes which change these features is not trivial with the existing surface describing parameters. In this work the application of a parameter called localization factor is demonstrated for the quantitative characterization of surface structures and for processes which alter the shape of these structures. The theory and optimal operation range of this parameter are discussed with three application examples: microstructure characterization of gold thin films, characterization of the changes in the grain structure of these films during thermal annealing, and finally, characterization of the oxidation processes on a polished tin surface.