Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1589213 | Micron | 2012 | 11 Pages |
Abstract
⺠Intensive use of Monte Carlo simulations for procedure optimization. ⺠Low voltage and low vacuum scanning electron microscopy. ⺠Guidelines for variable pressure microscope parameters optimization. ⺠Influences of beam scattering in image quality.
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
Luis Rogerio de Oliveira Hein, Kamila Amato de Campos, Pietro Carelli Reis de Oliveira Caltabiano,