| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1589268 | Micron | 2012 | 9 Pages |
Electron stimulated oxidation of CaF2 in transmission electron microscope has been thoroughly studied using various electron microscopy techniques, including imaging, electron diffraction and electron energy-loss spectroscopy. It found that the electron irradiation induced CaO locate on the edge of specimen. The oxidation process is associated with desorption of F by electron irradiation, and originates from O impurities in the specimen. Driven by electric field produced by electron irradiation, the O ions inside bulk diffuse to the edge region, occupying the interstitials of metallized Ca lattice. Therefore, the accumulation of O along the edge of specimen results in forming CaO.
► This study provides a detailed study of oxidation process in CaF2 in TEM. ► It discoversthat the O source foroxidation is theinternal O impurity. ► Oxidation is caused by diffusion of O from bulk to the edge of TEM specimen. ► The driving force for the O diffusion is the electric fielddue to irradiation. ► Electric field proceeds by ejection of secondary and Auger electrons.
