Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1589379 | Micron | 2012 | 5 Pages |
Abstract
⺠Agglomerate formation when ion-beam sputtering of Cu(In,Ga)(S,Se)2 thin films for solar cells. ⺠These agglomerates are composed of (mainly) Cu. ⺠Reactive gases such as XeF2 during ion-beam sputtering reduce the agglomeration. ⺠Enhanced imaging and analysis results, including a 3D EBSD data cube of a CuInS2 thin film, were obtained.
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
D. Abou-Ras, B. Marsen, T. Rissom, F. Frost, H. Schulz, F. Bauer, V. Efimova, V. Hoffmann, A. Eicke,