Article ID Journal Published Year Pages File Type
1589433 Micron 2011 7 Pages PDF
Abstract
► Low vacuum mode influence on the EDS profile resolution in ESEM. ► Application to Al/epoxy interface for water vapor and helium gas. ► Quantitative evaluation of the gas impact in term of contrast and spatial resolution. ► Complementary approach by comparing gas impact versus pressure and scattering regime.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Materials Science (General)
Preview
Pressure and scattering regime influence on the EDS profile resolution at a composite interface in environmental SEM
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