| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1589709 | Micron | 2008 | 6 Pages |
Abstract
Steps to improve the success yield of the in situ lift-out technique are presented. These include tapping the plinth of the system and monitoring the grounding current to check the lift-out needle is fixed to the material being removed. In addition, the relative success yields and the time to prepare a TEM lamella for the three main FIB methods are discussed and compared.
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
R.M. Langford, M. Rogers,