Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1589880 | Micron | 2007 | 8 Pages |
Abstract
This paper demonstrates the applicability of electron-spectroscopic imaging (ESI) for valence-state mapping of the iron oxide system. We have previously developed a set of signal-processing methods for an ESI series, to allow mapping of sp2/sp3 ratio, dielectric function and energy bandgap. In this study, these methods are applied to generate a valence-state map of an iron oxide thin film (Fe/α-Fe2O3). Two problems, data undersampling and a convolution effect associated with extraction of the image-spectrum from the core loss image series, were overcome by using cubic-polynomial interpolation and maximum-entropy deconvolution. As a result, the reconstructed image-spectrum obtained from the ESI series images has a quality as good as that of conventional electron energy-loss spectra. The L3/L2 ratio of the reconstructed ESI spectrum is determined to be 3.30 ± 0.30 and 5.0 ± 0.30 for Fe and α-Fe2O3, respectively. Our L3/L2 ratio mapping shows an accurate correspondence across the Cu/Fe/α-Fe2O3 region. The effect of delocalization and chromatic aberration on the ESI resolution is discussed and estimated to be about 2 nm for the case of L3/L2 ratio mapping.
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
Ko-Feng Chen, Shen-Chuan Lo, Li Chang, Ray Egerton, Ji-Jung Kai, Juhn-Jong Lin, Fu-Rong Chen,