Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1589953 | Micron | 2008 | 10 Pages |
Abstract
A 1.25 MV high-voltage electron microscope with a B-type omega filter has been successfully installed at Kyushu University. An image detection chamber has been set inside a concrete block below the ground level without changing the frame structure for anti-vibration. Nearly the same design as that for the 200 kV microscope has been kept for the present omega filter except for its size. A new pre- and post-filter lens system with rotation-free imaging has been designed. Energy resolution, beam shape and stability of the filter have been measured. Some application data have been obtained to demonstrate the performance of the filter.
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Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
K. Omoto, K. Tsuno, M. Ohsaki, S. Matsumura, Y. Tomokiyo,