Article ID Journal Published Year Pages File Type
1589953 Micron 2008 10 Pages PDF
Abstract

A 1.25 MV high-voltage electron microscope with a B-type omega filter has been successfully installed at Kyushu University. An image detection chamber has been set inside a concrete block below the ground level without changing the frame structure for anti-vibration. Nearly the same design as that for the 200 kV microscope has been kept for the present omega filter except for its size. A new pre- and post-filter lens system with rotation-free imaging has been designed. Energy resolution, beam shape and stability of the filter have been measured. Some application data have been obtained to demonstrate the performance of the filter.

Related Topics
Physical Sciences and Engineering Materials Science Materials Science (General)
Authors
, , , , ,