Characterization of dc reactive magnetron sputtered cadmium indate films

Thin films of cadmium indate were deposited onto the glass substrates by employing dc magnetron sputtering from cadmium-indium alloy target under various substrate temperatures in the range 373-673 K. The films were characterized by studying their structural and electrical properties. The films formed at substrate temperature <423 K were amorphous while those deposited at ≥423 K were polycrystalline with cubic spinel structure. The films prepared at a substrate temperature of 673 K exhibited low electrical resistivity of 3.5 × 10−4 Ω cm and Hall mobility of 29 cm2/V s.