Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1590963 | Science and Technology of Advanced Materials | 2006 | 7 Pages |
Abstract
Subsequently the surface of the pores was thermally oxidized to form SiO2 layers, and arrayed glass tubes with picoliter volume were fabricated. On the other hand, the pore filling with metal was attempted using electrodeposition to obtain array of the metal needles. For this, the “single batch” process was developed to form the pore array and metal filling with single electrolyte, and array of metal micro needles was successfully formed. These processes demonstrated capability and possibility of the electrochemical processes for microscale fabrication, and further precise processes can be developed using these approaches.
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
Hirotaka Sato, Takayuki Homma,